Research on A Novel Reliable MEMS Bistable Solid State Switch

As a result of the unpredictable nature extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for MEMS switch (MEMS-S3). In particular, this must remain stable without any energy input after state transition (i.e., it be bistable). paper, bistable (MEMS-bS3) is designed that based on concept producing micro-explosion. The reliable switching MEMS-bS3 studied via heat conduction theory verified both simulations experimental methods. results show these switches can produce micro-explosions driven by 33 V/47 μF pulse energy. However, metal film bridge (MFB) structures used in with smaller dimensions (80×20 μm2, 90×30 100×40 μm2) could not enable to realize transition, rate was less than 40%. When MFB reached 120×60 μm2 or 130×70 exceeded 80%, response time μs-scale.